Antrittsvorlesung Dr. Paul Jansen, ASML Research, The Netherlands
From photon to phone: interdisciplinary challenges in EUVlithography
Start Date
18.04.2023 - 16:45
Event End
18.04.2023 - 18:15
Location
ETH Zürich, Hönggerberg
Hönggerberg HCI J3
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From photon to phone: interdisciplinary challenges in EUVlithography